Center for Integrated Nanotechnologies Integration Laboratories: PH3 Operations
CX(s) Applied: B3.6
Location(s): Albuquerque, New Mexico
Sandia National Laboratories/New Mexico (SNL/NM) proposes to operate an Atomic-Precision Fabrication Tool in the Center for Integrated Nanotechnologies (CINT). Installation and hydrogen-gas operation of the Atomic-Precision Fabrication Tool, to be located in the CINT Integration Lab Class 1,000 Cleanroom, Room 1512 (Flex Bay Lab), was analyzed previously. The current proposal involves use of the tool for a process using phosphine gas. Phosphine would be delivered via a Safe Delivery Source (SDS) subatmospheric lecture-sized bottle/cylinder (commonly used at universities throughout the United States), housed in a built-in and exhausted hazardous gas cabinet within the tool.